✦ LIBER ✦

Alkaline etching of macroporous silicon

✍ Scribed by Lehmann, Volker

Publisher: John Wiley and Sons
Year: 2007
Tongue: English
Weight: 309 KB
Volume: 204
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.200674324

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✦ Synopsis

Abstract

Square pore cross‐sections and pore arrays of high porosity can be produced by subsequent alkaline etching of macroporous silicon membranes. The dependence of pore geometry on etching time, solution temperature and composition is investigated. The produced membranes offer new roads to investigate the formation of pyramidal hillocks during alkaline etching; an effect which is known for half a century, but not understood in detail. (© 2007 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

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