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Pushing the limits of macroporous silicon etching

✍ Scribed by S. Matthias; F. Müller; J. Schilling; U. Gösele

Publisher: Springer
Year: 2005
Tongue: English
Weight: 316 KB
Volume: 80
Category: Article
ISSN: 1432-0630
DOI: 10.1007/s00339-004-3193-x

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