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Effect of rare gas addition on deep trench silicon etch

✍ Scribed by Siddhartha Panda; Richard Wise; Aelan Mosden; Kenro Sugiyama; Joseph Camilleri

Publisher: Elsevier Science
Year: 2004
Tongue: English
Weight: 326 KB
Volume: 75
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2004.05.009

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