✦ LIBER ✦
On the origin of deep pit formation for gas phase HCl etched (111) silicon wafers
✍ Scribed by K. Tsukamoto; L.J. Giling
- Publisher
- Elsevier Science
- Year
- 1982
- Tongue
- English
- Weight
- 433 KB
- Volume
- 60
- Category
- Article
- ISSN
- 0022-0248
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