✦ LIBER ✦

Wet etching of silicon structures bounded by (311) sidewalls

✍ Scribed by D Resnik; D Vrtacnik; U Aljancic; S Amon

Book ID: 114156038
Publisher: Elsevier Science
Year: 2000
Tongue: English
Weight: 846 KB
Volume: 51-52
Category: Article
ISSN: 0167-9317
DOI: 10.1016/s0167-9317(99)00519-5

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Structural and optical characteristics o

Structural and optical characteristics of silicon nanowires fabricated by wet chemical etching

✍ Meiguang Zhu; Xuejiao Chen; Zhiliang Wang; Yun Chen; Dianfei Ma; Hui Peng; Jian 📂 Article 📅 2011 🏛 Elsevier Science 🌐 English ⚖ 700 KB

Optical properties of black silicon prep

Optical properties of black silicon prepared by wet etching

✍ Yuanjie Su, Shibin Li, Guodong Zhao, Zhiming Wu, Yajie Yang, Wei Li, Yadong Jian 📂 Article 📅 2012 🏛 Springer US 🌐 English ⚖ 316 KB

Improving the sidewall quality of nanose

Improving the sidewall quality of nanosecond laser-drilled deep through-silicon vias by incorporating a wet chemical etching process

✍ Chao-Wei Tang; Kuan-Ming Li; Hong-Tsu Young 📂 Article 📅 2012 🏛 The Institution of Engineering and Technology 🌐 English ⚖ 198 KB

1D photonic crystal fabricated by wet et

1D photonic crystal fabricated by wet etching of silicon

✍ V.A. Tolmachev; E.V. Astrova; J.A. Pilyugina; T.S. Perova; R.A. Moore; J.K. Vij 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 392 KB

Photoluminescence of samples produced by

Photoluminescence of samples produced by electroless wet chemical etching: Between silicon nanowires and porous structures

✍ Voigt, Felix ;Sivakov, Vladimir ;Gerliz, Viktor ;Bauer, Gottfried H. ;Hoffmann, 📂 Article 📅 2011 🏛 John Wiley and Sons 🌐 English ⚖ 751 KB

## Abstract Samples containing silicon nanowires (Si‐NWs) and highly porous structures (P‐Si) were prepared by electroless wet chemical etching (EWCE) of crystalline silicon wafers using various etching parameters. Photoluminescence (PL) measurements were performed with excitation at 488 nm and a p

Electron collimating structures, evapora

Electron collimating structures, evaporation masks and vacuum chucks made by anisotropic wet etching of silicon

✍ John Benjamin; John White 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 932 KB