✦ LIBER ✦
Electron collimating structures, evaporation masks and vacuum chucks made by anisotropic wet etching of silicon
✍ Scribed by John Benjamin; John White
- Publisher
- Elsevier Science
- Year
- 1985
- Tongue
- English
- Weight
- 932 KB
- Volume
- 3
- Category
- Article
- ISSN
- 0167-9317
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