Improvement of crystalline quality of epitaxial Si layers by ion-implantation techniques

✍ Scribed by Lau, S. S.; Matteson, S.; Mayer, J. W.; Revesz, P.; Gyulai, J.; Roth, J.; Sigmon, T. W.; Cass, T.

• Book ID: 120885131
• Publisher: American Institute of Physics
• Year: 1979
• Tongue: English
• Weight: 422 KB
• Volume: 34
• Category: Article
• ISSN: 0003-6951
• DOI: 10.1063/1.90564