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Effects of microwave annealing on crystalline quality of ion-implanted SiC epitaxial layers

✍ Scribed by Nadeemullah A. Mahadik; Syed B. Qadri; Siddarth G. Sundaresan; Mulpuri V. Rao; Yonglai Tian; Qingchun Zhang

No coin nor oath required. For personal study only.

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