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Comparison of Solid-State Microwave Annealing with Conventional Furnace Annealing of Ion-Implanted SiC

✍ Scribed by SIDDARTH G. SUNDARESAN; MULPURI V. RAO; YONGLAI TIAN; JOHN A. SCHREIFELS; MARK C. WOOD; KENNETH A. JONES; ALBERT V. DAVYDOV

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