Dynamic annealing study of SiC epilayers implanted with Ni ions at different temperatures

✍ Scribed by J. García López; Y. Morilla; J.C. Cheang-Wong; G. Battistig; Z. Zolnai; J.L. Cantin

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 410 KB
• Volume: 267
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2009.01.030