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Characterization of Crystallinity of SiC Surface Layers Produced by Ion Implantation

✍ Scribed by Theodossiu, E. ;Baumann, H. ;Klimenkov, M. ;Matz, W. ;Bethge, K.

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 189 KB
Volume: 182
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200012)182:2<653::aid-pssa653>3.0.co;2-i

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