Shallow Nanoporous Surface Layers Produced by Helium Ion Implantation

✍ Scribed by P. B. Johnson; A. Markwitz; P. W. Gilberd

• Publisher: John Wiley and Sons
• Year: 2001
• Tongue: English
• Weight: 171 KB
• Volume: 13
• Category: Article
• ISSN: 0935-9648
• DOI: 10.1002/1521-4095(200107)13:12/13<997::aid-adma997>3.0.co;2-k