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Ion Beam Synthesis and Characterization of Crystalline Si3N4 Surface Layers

✍ Scribed by Theodossiu, E. ;Baumann, H. ;Matz, W. ;M�cklich, A.

Publisher: John Wiley and Sons
Year: 2002
Tongue: English
Weight: 171 KB
Volume: 194
Category: Article
ISSN: 0031-8965
DOI: 10.1002/1521-396x(200211)194:1<47::aid-pssa47>3.0.co;2-o

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