Characterization of SiC buffer layer formation by reaction of Si(100) surface with methane + hydrogen plasma

✍ Scribed by C. Bittencourt

• Publisher: John Wiley and Sons
• Year: 2000
• Tongue: English
• Weight: 145 KB
• Volume: 30
• Category: Article
• ISSN: 0142-2421
• DOI: 10.1002/1096-9918(200008)30:1<603::aid-sia783>3.0.co;2-a