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Crystalline quality improvement of SOS films by SI implantation and subsequent annealing

✍ Scribed by Tomoyasu Inoue; Toshio Yoshii

Book ID: 107833945
Publisher: Elsevier Science
Year: 1981
Weight: 665 KB
Volume: 182-183
Category: Article
ISSN: 0029-554X
DOI: 10.1016/0029-554x(81)90796-5

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