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Improved depth resolution by sample rotation during Auger electron spectroscopy depth profiling

✍ Scribed by A Zalar

Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 520 KB
Volume: 124
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(85)90269-x

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