Implantation of P ions in SiO2 layers with embedded Si nanocrystals

✍ Scribed by G.A Kachurin; S.G Cherkova; V.A Volodin; V.G Kesler; A.K Gutakovsky; A.G Cherkov; A.V Bublikov; D.I Tetelbaum

• Book ID: 113823137
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 448 KB
• Volume: 222
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/j.nimb.2004.03.076