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Phosphorus ion implantation in silicon nanocrystals embedded in SiO[sub 2]

✍ Scribed by Murakami, Kouichi; Shirakawa, Ryota; Tsujimura, Masatoshi; Uchida, Noriyuki; Fukata, Naoki; Hishita, Shun-ichi

Book ID: 121737504
Publisher: American Institute of Physics
Year: 2009
Tongue: English
Weight: 499 KB
Volume: 105
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.3088871

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