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Silicon nanocrystal formation upon annealing of SiO2layers implanted with Si ions

✍ Scribed by G. A. Kachurin; S. G. Yanovskaya; V. A. Volodin; V. G. Kesler; A. F. Leier; M. -O. Ruault


Book ID
110131517
Publisher
Springer
Year
2002
Tongue
English
Weight
74 KB
Volume
36
Category
Article
ISSN
1063-7826

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