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Effect of Si implantation on the microstructure of silicon nanocrystals and surrounding SiO2 layer

✍ Scribed by G.G. Ross; R. Smirani; V. Levitcharsky; Y.Q. Wang; G. Veilleux; R.G. Saint-Jacques

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 265 KB
Volume: 230
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2004.12.040

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