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Implantation-induced defects in silicon carbide

✍ Scribed by G Pensl; T Frank; M Krieger; M Laube; S Reshanov; F Schmid; M Weidner

Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
377 KB
Volume
340-342
Category
Article
ISSN
0921-4526

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