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Process-Induced Morphological Defects in Epitaxial CVD Silicon Carbide

✍ Scribed by J. A. Powell; D. J. Larkin

Publisher: John Wiley and Sons
Year: 1997
Tongue: English
Weight: 647 KB
Volume: 202
Category: Article
ISSN: 0370-1972
DOI: 10.1002/1521-3951(199707)202:1<529::aid-pssb529>3.0.co;2-e

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