✦ LIBER ✦

Implantation damage and anomalous diffusion of implanted boron in silicon

✍ Scribed by Guo, Qiang; Bao, Ximao; Hong, Jianming; Yan, Yong; Feng, Duan

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Implantation damage and anomalous diffus

✍ Kaabi, L. ;Gontrand, C. ;Lemiti, M. ;Balland, B. 📂 Article 📅 1993 🏛 John Wiley and Sons 🌐 English ⚖ 520 KB

Analysis of low energy boron implants in

✍ L. Kaabi; C. Gontrand; B. Remaki; F. Seigneur; B. Balland 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 729 KB

Analysis of low energy boron implants in

📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 127 KB

Anomalous diffusion of implanted boron i

✍ Bao, Xi-Mao ;Hua, Xue-Mei 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 290 KB

Diffusion of Boron Implanted into Silico

✍ Stelmakh, V. F. ;Suprun-Belevich, Yu. R. ;Tkachev, V. D. ;Chelyadinskii, A. R. 📂 Article 📅 1985 🏛 John Wiley and Sons 🌐 English ⚖ 240 KB

Damage dependent electrical activation o

✍ H. Ryssel; H. Müller; K. Schmid 📂 Article 📅 1974 🏛 Springer 🌐 English ⚖ 273 KB