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Diffusion of Boron Implanted into Silicon

✍ Scribed by Stelmakh, V. F. ;Suprun-Belevich, Yu. R. ;Tkachev, V. D. ;Chelyadinskii, A. R.

Publisher: John Wiley and Sons
Year: 1985
Tongue: English
Weight: 240 KB
Volume: 89
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210890155

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