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Impacts of SiN deposition parameters on n-channel metal-oxide-semiconductor field-effect-transistors

✍ Scribed by Ching-Sen Lu; Horng-Chih Lin; Tiao-Yuan Huang

Book ID: 108271686
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 319 KB
Volume: 52
Category: Article
ISSN: 0038-1101
DOI: 10.1016/j.sse.2008.06.023

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