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Impact of TiN post-treatment on metal insulator metal capacitor performances

✍ Scribed by A. Bajolet; J-P. Manceau; S. Bruyère; R. Clerc; M. Proust; N. Gaillard; J-C. Giraudin; P. Delpech; L. Montès; G. Ghibaudo


Book ID
104051562
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
480 KB
Volume
83
Category
Article
ISSN
0167-9317

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