✦ LIBER ✦
Leakage Current Improvement of Ni∕TiNiO∕TaN Metal-Insulator-Metal Capacitors using Optimized N[sup +] Plasma Treatment and Oxygen Annealing
✍ Scribed by Huang, C. C.; Cheng, C. H.; Chin, Albert; Chou, C. P.
- Book ID
- 121852956
- Publisher
- The Electrochemical Society
- Year
- 2007
- Tongue
- English
- Weight
- 515 KB
- Volume
- 10
- Category
- Article
- ISSN
- 1099-0062
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