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IIB-2 a novel high-performance MOSFET fabricated using focused ion-beam doping

✍ Scribed by Waja, Y.; Shukuri, S.; Tamura, M.; Masuda, H.; Ishitani, T.

Book ID
114594963
Publisher
IEEE
Year
1984
Tongue
English
Weight
317 KB
Volume
31
Category
Article
ISSN
0018-9383

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Fabrication of high IcΓ—Rn YBCO-Josephson
Fabrication of high IcΓ—Rn YBCO-Josephson-junctions on MgO- substrates using a focused-ion-beam system
✍ Ch. Neumann; K. Yamaguchi; K. Hayashi; K. Suzuki; Y. Enomoto; S. Tanaka πŸ“‚ Article πŸ“… 1993 πŸ› Elsevier Science 🌐 English βš– 970 KB

We report on the fabrication of YBCO-Josephson-junctions using a narrow-focused Ga-ion beam to damage the MgO-substrates prior to film deposition. On top of the micro-areas damaged by the ion-beam, the as-grown YBCO-film shows weak-link properties. The final junction was achieved using photolithogra