IIB-1 Subhalf-micrometer MOSFET's fabricated using focused ion-beam lithography

✍ Scribed by Rensch, D.B.; Chen, J.Y.

• Book ID: 114594961
• Publisher: IEEE
• Year: 1984
• Tongue: English
• Weight: 164 KB
• Volume: 31
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1984.21832