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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - "PLUG-UP" - a new concept for fabricating SOI MEMS devices

✍ Scribed by Kiihamaki, J.; Pekko, P.; Kattelus, H.; Sillanpaa, T.; Mattila, T.

Book ID: 126731265
Publisher: IEEE
Year: 2003
Weight: 358 KB
Category: Article
ISBN-13: 9780780370661
DOI: 10.1109/DTIP.2003.1287042

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