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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Getters films at wafer level for wafer to wafer bonded MEMs

✍ Scribed by Moraja, M.; Amiotti, M.

Book ID: 120254615
Publisher: IEEE
Year: 2003
Weight: 441 KB
Category: Article
ISBN-13: 9780780370661
DOI: 10.1109/DTIP.2003.1287065

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