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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - SU-8 process for biomedical inspection μ-carriers

✍ Scribed by Chen, P.-H.; Ding, P.-P.; Kuo, J.-S.

Book ID: 120196553
Publisher: IEEE
Year: 2003
Weight: 262 KB
Category: Article
ISBN-13: 9780780370661
DOI: 10.1109/DTIP.2003.1287071

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