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[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Capacitive humidity sensor using a polyimide sensing film

✍ Scribed by Laconte, J.; Wilmart, V.; Raskin, J.-P.; Flandre, D.

Book ID: 124061984
Publisher: IEEE
Year: 2003
Weight: 341 KB
Category: Article
ISBN-13: 9780780370661
DOI: 10.1109/DTIP.2003.1287041

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