𝔖 Bobbio Scriptorium

✦ LIBER ✦

[IEEE Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Cannes, France (5-7 May 2003)] Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS 2003. - Ion track lithography: novel low-cost process to form deep vertical and high aspect ratio MEMS in flexible laminates

✍ Scribed by Majjad, H.; Lindeberg, M.; Skupinski, M.; Hjort, K.

Book ID: 126597491
Publisher: IEEE
Year: 2003
Weight: 680 KB
Category: Article
ISBN-13: 9780780370661
DOI: 10.1109/DTIP.2003.1287060

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