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[IEEE International Conference on Microelectronic Test Structures - Trento, Italy (25-28 March 1996)] Proceedings of International Conference on Microelectronic Test Structures - A wafer level monitoring method for plasma-charging damage using antenna PMOSFET test structure

✍ Scribed by Watanabe, H.; Komori, J.; Higashitani, K.; Mashiko, Y.; Koyama, H.

Book ID: 126750647
Publisher: IEEE
Year: 1996
Weight: 388 KB
Category: Article
ISBN-13: 9780780327832
DOI: 10.1109/ICMTS.1996.535659

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