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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Laterally oscillated and force-balanced micro vibratory rate gyroscope supported by fish hook shape springs

✍ Scribed by Park, K.Y.; Lee, C.W.; Oh, Y.S.; Cho, Y.H.

Book ID: 126745137
Publisher: IEEE
Year: 1997
Weight: 990 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581909

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