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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Sensor based on a MOS transistor for applications in scanning force microscopy

✍ Scribed by Akiyama, T.; Tonin, A.; Hidber, H.R.; Brugger, J.; Vittiger, P.; Staufer, U.; De Rooij, N.F.

Book ID: 126660025
Publisher: IEEE
Year: 1997
Weight: 706 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581789

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