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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Measurements of Young's modulus, Poisson's ratio, and tensile strength of polysilicon

✍ Scribed by Sharpe, W.N.; Bin Yuan, ; Vaidyanathan, R.; Edwards, R.L.

Book ID: 125852044
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 689 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581881

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