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[IEEE IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Nagoya, Japan (26-30 Jan. 1997)] Proceedings IEEE The Tenth Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Robots - Fabrication of electrophoresis devices on quartz and glass substrates using a bonding with HF solution

✍ Scribed by Nakanishi, H.; Nishimoto, T.; Nakamura, N.; Nagamachi, S.; Arai, A.; Iwata, Y.; Mito, Y.

Book ID: 120880889
Publisher: IEEE
Year: 1997
Tongue: English
Weight: 641 KB
Category: Article
ISBN-13: 9780780337442
DOI: 10.1109/MEMSYS.1997.581834

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