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[IEEE IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Tempe, Arizon, USA (Dec. 5, 2005)] IEEE InternationalElectron Devices Meeting, 2005. IEDM Technical Digest. - Ultra-thin (EOT=3Å) and low leakage dielectrics of La-alminate directly on si substrate fabricated by high temperature deposition

✍ Scribed by Suzuki, M.; Tomita, M.; Yamaguchi, T.; Fukushima, N.

Book ID: 120067615
Publisher: IEEE
Year: 2005
Tongue: English
Weight: 561 KB
Category: Article
ISBN-13: 9780780392687
DOI: 10.1109/IEDM.2005.1609371

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