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[IEEE IEEE International Electron Devices Meeting - San Francisco, CA, USA (8-11 Dec. 2002)] Digest. International Electron Devices Meeting, - 65 nm CMOS technology (CMOS5) with high density embedded memories for broadband microprocessor applications

✍ Scribed by Yanagiya, N.; Matsuda, S.; Inaba, S.; Takayanagi, M.; Mizushima, I.; Ohuchi, K.; Okano, K.; Takahasi, K.; Morifuji, E.; Kanda, M.; Matsubara, Y.; Habu, M.; Nishigoori, M.; Honda, K.; Tsuno, H.; Yasumoto, K.; Yamamoto, T.; Hiyama, K.; Kokubun, K.; Suzuki, T.; Yoshikawa, J.; Sakurai, T.; Ishizuka, T.; Shoda, Y.; Moriuchi, M.; Kishida, M.; Matsumori, H.; Harakawa, H.; Oyamatsu, H.; Nagashima, N.; Yamada, S.; Noguchi, T.; Okamoto, H.; Kakumu, M.

Book ID: 126023442
Publisher: IEEE
Year: 2002
Weight: 260 KB
Category: Article
ISBN-13: 9780780374621
DOI: 10.1109/IEDM.2002.1175778

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