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[IEEE ICMTS 2005. 2005 International Conference on Microelectronic Test Structures - Leuven, Belgium (4-7 April 2005)] Proceedings of the 2005 International Conference on Microelectronic Test Structures, 2005. ICMTS 2005. - A failure analysis test structure for deep sub-micron CMOS copper interconnect technologies

✍ Scribed by Cabrini, A.; Cantarelli, D.; Cappelletti, P.; Casiraghi, R.; Iezzi, D.; Maurelli, A.; Pasotti, M.; Rolandi, P.L.; Torelli, G.

Book ID: 121275917
Publisher: IEEE
Year: 2005
Weight: 869 KB
Category: Article
ISBN-13: 9780780388550
DOI: 10.1109/ICMTS.2005.1452279

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