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[IEEE ICMTS 2002. Proceedings of the 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (2003.03.17-2003.03.20)] International Conference on Microelectronic Test Structures, 2003. - An electrical monitor of deep trench depth

✍ Scribed by Roggenbauer, T.; Khemka, V.; Parthasarathy, V.; Puchades, I.; Zhu, R.

Book ID: 126639727
Publisher: IEEE
Year: 2003
Weight: 179 KB
Category: Article
ISBN-13: 9780780376533
DOI: 10.1109/ICMTS.2003.1197363

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