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[IEEE ICMTS 2002. Proceedings of the 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (2003.03.17-2003.03.20)] International Conference on Microelectronic Test Structures, 2003. - An advanced defect-monitoring test structure for electrical measurements and defect localization

✍ Scribed by Hamamura, Y.; Kumazawa, T.; Tsunokuni, K.; Sugimoto, A.; Asakura, H.

Book ID: 126622602
Publisher: IEEE
Year: 2003
Weight: 413 KB
Category: Article
ISBN-13: 9780780376533
DOI: 10.1109/ICMTS.2003.1197372

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