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[IEEE ICMTS 2002. 2003 International Conference on Microelectronic Test Structures - Monterey, CA, USA (17-20 March 2003)] International Conference on Microelectronic Test Structures, 2003. - Polysilicon resistive heated scribe lane test structure for productive wafer level reliability monitoring of NBTI

โœ Scribed by Muth, W.; Martin, A.; von Hagen, J.; Smeets, D.; Fazekas, J.


Book ID
126723942
Publisher
IEEE
Year
2003
Weight
369 KB
Category
Article
ISBN-13
9780780376533

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