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[IEEE 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits - Singapore (8-12 July 2002)] Proceedings of the 9th International Symposium on the Physical and Failure Analysis of Integrated Circuits (Cat. No.02TH8614) - Isothermal em as highly accelerated test method for copper damascene lines

✍ Scribed by Kin Leong, ; Yap Andrew, ; Bee Hoon Lim, ; Eng Chye Chua, ; Yeow Kheng Lim, ; Suat Cheng, ; Khoo Sherry,

Book ID: 126665192
Publisher: IEEE
Year: 2002
Tongue: English
Weight: 995 KB
Category: Article
ISBN-13: 9780780374164
DOI: 10.1109/IPFA.2002.1025631

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