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[IEEE 31st European Solid-State Device Research Conference - Nuremberg, Germany (2001.9.11-2001.9.13)] 31st European Solid-State Device Research Conference - Pockets and offset spacer engineering for 100 nm CMOS

✍ Scribed by Surdeanu, R.; Dachs, C.J.J.; Stolk, P.A.; Cubaynes, F.N.; Ponomarev, Y.V.

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