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[IEEE 31st European Solid-State Device Research Conference - Nuremberg, Germany (2001.9.11-2001.9.13)] 31st European Solid-State Device Research Conference - Experimental and Numerical Study of Shallow Trench Isolation Processes

โœ Scribed by Erlebach, A.; Yun, C.S.; Matveev, D.; Mickevicius, R.; Nouri, F.; Golnas, A.; Zelenka, S.; Fichtner, W.


Book ID
126925448
Publisher
IEEE
Year
2001
Weight
122 KB
Category
Article
ISBN-13
9782914601016

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