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[IEEE 2011 IEEE International Integrated Reliability Workshop (IIRW) - South Lake Tahoe, CA, USA (2011.10.16-2011.10.20)] 2011 IEEE International Integrated Reliability Workshop Final Report - Electron paramagnetic resonance studies of interlayer dielectrics

✍ Scribed by Bittel, B. C.; Pomorski, T. A.; Lenahan, P. M.; King, S.; Mays, E.

Book ID: 126653869
Publisher: IEEE
Year: 2011
Weight: 600 KB
Category: Article
ISBN: 1457703106
DOI: 10.1109/IIRW.2011.6142587

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