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[IEEE 2009 IEEE International Reliability Physics Symposium - Montreal, QC, Canada (2009.04.26-2009.04.30)] 2009 IEEE International Reliability Physics Symposium - New perspectives of dielectric breakdown in low-k interconnects

✍ Scribed by Kok-Yong Yiang, ; Yao, H. Walter; Marathe, Amit; Aubel, Oliver

Book ID: 126630335
Publisher: IEEE
Year: 2009
Weight: 787 KB
Category: Article
ISBN: 1424428882
DOI: 10.1109/IRPS.2009.5173299

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